Optical Interconnect for 3D Integration of Ultra-Low Loss Planar Lightwave Circuits
نویسندگان
چکیده
We demonstrate the fabrication of a low loss broadband vertical coupler for use in the 3D integration of Si3N4 based planar waveguides. Coupling loss of 0.2 dB was achieved and interaction between layers investigated. OCIS codes: (230.0230) Optical Devices; (230.7390) Waveguides, planar; (230.4170) Multilayers.
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